Interface flange: DN150CF
Pumping rate (L/S):
On air: 120
Ar: 1.2
The starting pressure is less than 5 * (Pa): 10-4
Ultimate pressure (Pa): 7 x 10-8
Baking temperature (C):
Magnet: 200
Without magnet: < 300
Operating voltage (KV): +7
Electrode unit (unit): 4
Weight (kg): 30
Length * width * height (mm): 350 x 250 x 307
